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ASML, TSMC And Samsung Adopt Larger Masks For High-NA EUV Chips

The companies plan to use larger photomasks with new scanners by 2033 to boost yields and lower costs for advanced chip manufacturing.

3 publishers · 3 articles · first seen 8 Sept 2026 · updated 17h ago

Sources

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  1. ASML and TSMC want bigger masks for smaller chips www.theregister.com
  2. TSMC to start using High-NA EUV lithography in 2030 — A10 or A11 technology prime candidates for use Latest from Tom's Hardware
  3. Samsung and TSMC hope AMSL's new machines will help address the chip shortage Engadget - Technology News & Expert Reviews

In this story

  • ASML
  • TSMC
  • Samsung

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